Airco Temescal HRS 2550
Airco Temescal HRS 2550
AIRCO TEMESCAL HRS 2550 SPUTTERING SYSTEM
3 TARGETS
AUTO/MANUAL VALVING
DIRECT DRIVE MECHANICAL PUMP
DIFFUSION PUMP
CAN BE UPGRADED WITH ROTATING FIXTURE TO HOLD (4) 8″ WAFERS
The Airco Temescal HRS 2550 is a sputtering system. It has 3 targets, auto/manual valving, direct drive mechanical pump,and diffusion pump. Also has a r/f power supply. Can Upgrade to rebuilt CTI-10 Cryopump head with compressor.
Technical Data
Dimensions: 16 inches high x 25.5-inch
diameter (406 mm x 647.7 mm)
Fixturing: carousel vertical mounted substrate holders, optional flip-flop capability
Capacity: (minimum) 64 2-inch (51 mm) wafers
Shielding: minimum-3-bounce
Substrate heat: maximum 3 kW
Number of cathodes: maximum of three Argon inlet bellows-sealed manual valve with metering capability
Vacuum cubicle (including electronics enclosure): 82.5 inches high (with cabinet
top console) x 64 inches wide x 40 inches deep (2100 mm x 1625 mm x 1025 mm)
Power supply (Including control consoles):
36 inches high x 25.5 inches wide x 25.5 inches deep (915 mm m x 650 mm x 650 mm)
Typical static deposition rates: 15,000
A/minute aluminum, 20,000 A/minute copper
Distribution: ± 5% with source masking
Target size: 8.25 inches x 3.56 inches (210 mm x 90 mm)
Operating voltage: -400 to -800V dc cathode potential (peak deposition rates at
-400 to -500V dc)
Maximum operating power level: 5 KW. 0.2 to 7A
Operating pressure: 1 x 10-2 to 1 x 10-3 torr
Cooling water: (0.5gpm at 20°C)per source
Output: 5 kW, current-adjustable from 0.2A
to 7A; voltage from 50V dc to 800V dc;
pressure-dependent
Duty cycle: 100%
Metering: output current, 0 to 1A, and 0 to
10A, dc scale; cathode-to-ground voltage,
0 to 1.5 kV dc; anode-to-ground voltage,
0 to 150V dc
Interlocks: power supply, cubicle doors,water, chamber lid and chamber pressure
Required service: 208/230V ac, 25A, 50/60 Hz, 3 phase
Ultimate vacuum: 10-8 torr range
Diffusion pump: 5300 liter/second, 10 inches high x 16-inch i.d
Mechanical pump: 35 cfm (1000 liter/second, dual stage
Cold trap: 4.5 liter capacity; 2600 square inch (1.67 m2) surface area
High vacuum valve: 16-inch (406 mm) i.d., bellows-sealed
High vacuum bypass valve: 3-inch (75 mm) i.d., variable conductance
Famine valve and roughing valve: 2-inch (51 mm) i.d
Valve actuation: electropneumatic (all vacuum valves)
Valve sequencing: manual and automatic
Interested in this Equipment? Contact Us Today!
Please note: JMI has thousands of machines in stock and the photo of the item taken at our facility is for reference. There may be multiple models of this item in stock. JMI will email a video of any machine purchased under payment terms agreed, demonstrating operation (prior to shipment) at your request.
We also list some of our equipment ready to go now on Ebay!
JMI has been selling refurbished semiconductor manufacturing equipment for over 40 years. Experienced technicians and a vast inventory of machines and parts enables JMI to offer support on the majority of tools we sell….for many years after the Original equipment manufacturer (OEM) does not.
Many tools are also listed on ebay if you prefer to purchase online immediately.
To avoid Ebay commissions, you can also place most machines on hold immediately by calling or texting J on his cell phone (978) 771-0481.
Reasons to Choose J.M. Industries, Inc.
- JM Industries is selling this item in good condition and fully operational. The refurbished Airco Temescal HRS 2550 comes with a 30 day warranty. (extended warranties are available for an additional cost).
- If you purchase the Airco Temescal HRS 2550, JMI will fully test the item. In many cases JMI will also run your product with the equipment to minimize your set up time. (just ask).
- Buy the Airco Temescal HRS 2550 direct and avoid broker commissions.
- Email us for more photos of the guaranteed Airco Temescal HRS 2550. Feel free to call us with any questions regarding the machine in stock. Also contact JMI to learn about options that may be available for this item.
- If there are any special details that are critical on the Airco Temescal HRS 2550 for your process, please let us know so we can be sure it meets your needs.
- J.M. Industries offers support for many other machines, like the Airco Temescal HRS 2550, even after the OEM (Original Equipment Manufacturer) discontinues offering parts or service.
- Please inspect all shock watch indications when you receive the Airco Temescal HRS 2550 from J.M. Industries before signing the bill of lading to ensure the equipment has been delivered in the same good condition it was shipped.
- If would would like to see an emailed video of the Airco Temescal HRS 2550 you have purchased in operation prior to shipment, please let us know. Please note: We may need a deposit prior to sending a video of the equipment to cover techncian costs.
